A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors
نویسندگان
چکیده
منابع مشابه
Demonstrating sub-nm closed loop MEMS flattening.
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2017
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2017.2690942